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Zygo: New View 5032
- Zygo's patented technology FDA and noncontact Scanning White Light Interferometer (SWLI) make it possible to measure surface roughness, step heights, and critical dimensions in a quantitative 3D image.
- New View adopts rapid Scanning White Light Interferometer, wide area measurement range, a continuously variable image zoom.
- High accuracy and repeatability
- Data can be stitched with field stitching capability
Specifications
| Type: | Non-contact Scanning White Light Interferometer |
|---|---|
| Vertical Scan Range: | <150μｍ |
| Objective Lens: | 10X,,50X |
| Image Zoom: | 0.4X, 0.5X, 0.8X, 1.0X, 1.3X, 2.0X |
| Field of View Range: | 0.14×0.11mm (Objective 10X・Image zoom 1.0X) |
| Lateral Resolution: | 0.64μm (Objective 10X) |
| Vertical Resolution: | 0.1nm |
| Stages: | XY automatic stage, Tip/Tilt automatic stage |
| Step Height Accuracy: | < 0.75% |
| Step Height Repeatability: | < 0.1% (1σ) |
| Sample (H×W×D) automatic stage: | 89mm×203mm×203mm |