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Zygo Corporation: VeriFire Asphere
- Zygo’s multi-zoned metrology method provides a high resolution measurement of an aspheric surface.
- The advanced software algorithms in the VeriFire Asphere utilize five axes of motorized stages to provide quick and easy alignment of an asphere.
- The VeriFire Asphere provides high resolution surface metrology for quantitative three-dimensional measurements of aspheric shaped surfaces.
- Hold multiple TS
- Measurement in corner cube angle of deviation.
Specification
| Transmission spheres: | 6 inch spheres |
|---|---|
| Zoom range: | ×1~×5 |
| Plane measurement repeatability: | <2nm (λ/300) 2σ |
| Accuracy of aspherical surfaces: | slope<30°:F/1.0⇒60nm (λ/10) slope<45°:F/0.71⇒100nm (λ/6) slope<60°:F/0.58⇒200nm (λ/3) |
| RMS repeatability: | <0.1nm (λ/10,000) 2σ |
| Aspherical measurement repeatability: | ≦3 nm (λ/200) RMS |