HOME>Quality>Panasonic Factory Solutions: UA3P-5
Panasonic Factory Solutions: UA3P-5
- Measurement in the smallest corners of objects with nano precision.
- Atomic force probe realized the measurement with maximum 0.01um.
- Feedback measurement data to processing machine fast.
Specification
| Measurement range [X, Y, Z-axis]: | 200 x 200 x 45 mm |
|---|---|
| Maximum sample size [X, Y, Z-axis]: | 330 x 330 x 230 mm |
| Measurement error of coordinates: | Up to 100mm within 0.05μm (repeatability within 0.05μm) |
| (Measurement range of XY coordinate axes): | Up to 200mm within 0.1μm (repeatability within 0.05μm) |
| Probe Measurement accuracy | Ruby stylus: Measurement surface inclination angle •Up to 30° 0.01 to 0.05μm •Up to 45° up to 0.1μm •Up to 60° up to 0.3μm |
| Maximum measurement angle: | 75° |